ࡱ> ~ R:bjbj87 HH8\9l--- #2E-----P:--p <3uS>=CN200710020037.0 < Ty>='}QW1NIQRsRhV <;NR{|S>=G02B6/28(2006.01)I <R{|S>=G02B6/28(2006.01)I;G02B6/125(2006.01)I;H04B10/12(2006.01)I <3uN)RCg N>=NWS'Yf[ <Sf N>=Y[\;N uQ <lQ_lQJT e>=2009.01.07 <lQ_lQJT S>=CN100449342 <N)RNt:gg>=WSN~~N)RFUhNt gPlQS <NtN>=F_e <3ue>=2007.02.08 <0W@W>=210096_lςwWSN^VLr|i2S <Xd>=,gSf^\NƖbIQ5uP[b/gW cONyY(WNO_cv`Q NQ\te *NhVNv:\[v^Y[sSaQRsv'}QW1NIQRsRhV0ُy'}Q W1NIQRsRhV SbN*NTWRhV(1) N:N'YNbI{N2v6q pe \O:NMRN~TWRhVvQzR+RN\O:NTN~TWRhVveQzޏ c vQyr_(WNTWRhV(1)SbY!jr^mWl[(6) (WY!jr^mWl[ (6)vNz g\O:NTWRhVeQzvUS!jeQ\l[(3) (WY!jr^mWl [(6)vQzl[ N gVWi(5)v^N1uVWi(5)Rv$NkQl [\O:NTWRhVv2*NQz (WY!jr^mWl[(6) N gIQRs6R!j WW(4)0 <VwNx>=_lς;32 <REC> <3uS>=CN200510126238.X < Ty>=핡{Sf[lv OluZnOUSvfel <;NR{|S>=C30B25/00(2006.01)I <R{|S>=C30B25/00(2006.01)I;C30B29/16(2006.01)I <3uN)RCg N>=-NVyf[bJS[SOxvz@b <Sf N>=u ge;c_܏;kn;Of[b <lQ_lQJT e>=2009.01.14 <lQ_lQJT S>=CN100451180 <N)RNt:gg>=-NyN)RFUhNt gP#NlQS <NtN>=kbN <3ue>=2005.11.30 <0W@W>=100083SN^wmm:SnNSN2u35S <Xd>=,gSfmS_5uP[TIQ5uP[(uSTirJS[SOPge6RYb/g W yr+R/fNy핡{Sf[lv OluZnOUSvfel0(W\필vw {Q Nz>enؚ~ZnO|\O:Nn SNz>en}|vf Ǐc6Rn:SN u:Sv)n^R^[slv O uZnOSOUSvf (WuǏ z-N>eeQ \ϑvؚ~x0 (uNz:Ns^b\SvWb_w{\OY{ Q (uN9h Y_N}|vfGrv_v Tvw{y:NQ{ (uegvOO}|vfGr OvQV[ (Ww{vs^bz ZnO|>en(WQ{vSNz Te>eeQ\ϑvؚ~ x| 6qTY{cwzz|~ bwzzT(uw\l\ \\}YSvw {>eeQ4ls^RppQGS)nRp c6R)n^R^ۏLZnOUSvfu0 <VwNx>=SN;11 <REC> <3uS>=CN200610019601.2 < Ty>=TqQbl[ƖbvObۏIQv10Gb/s APD{SvQ6R\O]z <;NR{|S>=H01L31/107(2006.01)I <R{|S>=H01L31/107(2006.01)I;H01L31/18(2006.01)I <3uN)RCg N>=fkIl5uOhVN gPlQS <Sf N>=NV^ <lQ_lQJT e>=2009.01.14 <lQ_lQJT S>=CN100452445 <N)RNt:gg>=fkIl[hfN)RNR@b <NtN>=Ğ^th <3ue>=2006.07.11 <0W@W>=430074VnSwfkIl^*mq\:Syb88S <Xd>=,gSflQ_NNyTqQbl[ƖbvObۏIQv10Gb/s APD{SvQ6R\O ]z mSNyTqQbl[ƖbvObۏIQv10Gb/s APD $\vQmSNyNS 6ޏSO_{v~gSvQ6R\O]z0,g{teSO~g:NNyTqQbl[Ɩbv0 NS6ޏSO_{ N N0R N InPcvJS~l^0 NS6T NS6O!kޏ c,g{6R\O]zSbMOCVDY^ PECVD IQ;RNSf[P Sf[nm ib ce S^yP[;R 5uP[_gS ё^\eRy SYt {Ry6R\O]zg ͑v/fSf[PT{Ry0,g{/fؚs0ݍyIQO|~vsQ.IQ5u P[hVN{TqQbl[NSOSN6R\O NN{SN]z MNONb,g NQ\N O_c [f;b9SM,gSf㉳QNObۏIQbvs^te'`0 <VwNx>=VnS;42 <REC> <3uS>=CN200510116481.3 < Ty>=\Gr <;NR{|S>=H01L33/00(2006.01)I <R{|S>=H01L33/00(2006.01)I <3uN)RCg N>=eYepQYeYnfXbJS[SO gP#NlQS <Sf N>=JO\;DWl\yr;M9\;BTi`;VwmR;UŖT^;ReY/Oes|_;Wnfbe;UeyrRe;J~KQ\;UV{i`_ <lQ_lQJT e>=2009.01.14 <lQ_lQJT S>=CN100452453 <N)RNt:gg>=-NVN)RNt(/n) gPlQS <NtN>= :_ <3ue>=2001.11.06 <0W@W>=_V9he!X <Xd>=,gSfcONy(uNIQ5uP[f[vGr $\vQ/fSIQNg{Gr [wQ gN*NSQIQP[v gn:S(8)TN*NwQ g\N*N&TQb(7 15 17)v&TQz(4) vQyr_(WN gn:S(8)N勯Gr vN*N;N\eT(18) gsQ0Wn(W&TQz(4)vTb (W &TQz(4)vN gn:S(8)[nvOb(5) Nb_bN*N\ b(6) &TQb(7 15 17)NObQ gn:S(8)vO b &TQbwQ g/_fvhb [l&TQbv gn:S(8) vg'YNJS:\[R<sub>1</sub>eg (uN NagN sSR<sub>1</sub>R<sub>2</sub>n<sub>A</sub>/n<sub>i</sub> vQ-NR<sub>2</sub>/f &TQb(7)vfsJS_ n<sub>A</sub>/fsXvb\s n<sub>i</sub>/f&TQz vPgevb\s0 <VwNx>=_V;DE <REC> <3uS>=CN200580016795.4 < Ty>=IQ5uP[JS[SONT(uNُyNvXWSO <;NR{|S>=H01L33/00(2006.01)I <R{|S>=H01L33/00(2006.01)I <3uN)RCg N>=eYepQYeYnfXbJS[SO gP#NlQS <Sf N>=aS\wmV(?i`yr <lQ_lQJT e>=2009.01.14 <lQ_lQJT S>=CN100452457 <N)RNt:gg>=SNƖsOwƋNCgNt gPlQS <NtN>=hgus^;hg~h <3ue>=2005.05.12 <0W@W>=_V9he!X <Xd>=,gSfmSNyIQ5uP[JS[SON vQwQ g\N*NSQ\(11) vJS[SOGr(1) @bJS[SOGrn(WXWSO(3)vQS(2)-N vQ-N@bQS(2)Ob0W1us~@bJS[SOGr(1)vX(31)vQO (32)b_bLuv^N\R(uS\ir((4)egkXEQ @bS\ir(nv @bJS[SOGr(1)v^N[1u@bJS[SOGr(1)@bS\v5ux\/f o}Y0WS\v0ُ7h0Wg @bX(31)vb_bQS(2)vLuvQO (32) O_(W@bJS[SONvckbvOƉV-N g NQO(32)v[ hQsr0WV~JS[SOGr(1)vRb(33) NSQ\vJS[SOGr (1)eg w @bRbYN4q_-N v^N@bRb[hQs~@wJS[SO Gr0W\RS\ir((4)@bv0dkY؏fN(uNُyJS[SON vXWSO0 <VwNx>=_V;DE <REC> <3uS>=CN200710086671.4 < Ty>=NymSO[_lfmIQ_gvňn <;NR{|S>=H01S3/00(2006.01)I <R{|S>=H01S3/00(2006.01)I;H01S3/02(2006.01)I;H01S3/04(2006.01)I;H01S3/042(2006.01)I <3uN)RCg N>=nNS'Yf[ <Sf N>=]lt;Ğ x;ĞNkp;g :_; s^;Ng hf <lQ_lQJT e>=2009.01.14 <lQ_lQJT S>=CN100452570 <N)RNt:gg>= <NtN>= <3ue>=2007.03.30 <0W@W>=100084SN^100084O{82R{nNS'Yf[N)RRlQ[ <Xd>=NymSO[_lfmIQ_gvelSňn ^\NIQf[NoIQIQ5uP[b/gW0[+T glfm IQn0IQf[&Tňn0mSO[_ňnTIQ~0vQ-NIQf[&TňncSlfmIQnSQvl fmIQmSOU4V ~ǏIQf[&Tňn&TvlfmIQ_g&T0RmSOU4VUQvmg-NQ tSm6eƖhVv-N_~[QmSOU4Vv-N_~Vm{ ۏmzNQtSm6eƖhVޏcep hVT_sl vN2NT cephVvۏmSNVm{vQmSvޏ _slvQzN mSOU4V NzޏmSOU4V0QtSm6eƖhV0Vm{0cephVT_sl2Ncb_bNN*N mSO[_ňn0,gSf㉳QNVSOoIQhVTIQ~oIQhV-NvؚRslfm SNOoIQ hVvQs^GWRs_0Rcؚ nxOoIQhV|~]\Ov3z['`TS`'`0 <VwNx>=SN;11 <REC> <3uS>=CN200710055785.2 < Ty>=JS[SOoIQ~5S5v_SplSf[nmňn <;NR{|S>=H01S5/024(2006.01)I <R{|S>=H01S5/024(2006.01)I;H01L21/00(2006.01)I;B08B3/04(2006.01)I;B08B3/08(2006.01)I <3uN)RCg N>=-NVyf[b%fIQf[|[:ghNirtxvz@b <Sf N>=R N;szQ;NgQё;Y <lQ_lQJT e>=2009.01.14 <lQ_lQJT S>=CN100452578 <N)RNt:gg>=%fNSN)RFUhNtNR@b <NtN>=upN <3ue>=2007.06.20 <0W@W>=130031 Tgw%f^NWSVn'Y16S <Xd>=,gSf^\NJS[SOIQ5uP[f[b/gW mSNyJS[SOoIQ~5S5v_ SplSf[nmňn Sb^^ /eg nWW GSMFg _e ,{N ajg ,{Najg ,{ Najg |9YǏ_eSNOnWWv[N GSMFg N NnR &^R,{ Najg NNv Tؚ^4ls^cR[ňv|9Y N Ny R N O9Y'}(W|9Y Nv_SplxmeQPmS_m^ cؚN_Spl vP(ϑTbTsv^N(Wv TveQSNN!k'`[bY*N_Splvn m cؚNY*N_SplPHegvN'`TnmHes0,gSf~g{US06R \Ob,gNO (uNؚRsJS[SOoIQ~505_SplSvQNplvSf[n m0 <VwNx>= Tg;22 <REC> <3uS>=CN200410027960.3 < Ty>=gIQSIQNg{~~op <;NR{|S>=G08G1/095(2006.01)I <R{|S>=G08G1/095(2006.01)I <3uN)RCg N>=hg_IN <Sf N>=hg_IN <lQ_lQJT e>=2009.01.28 <lQ_lQJT S>=CN100456336 <N)RNt:gg>= <NtN>= <3ue>=2004.07.08 <0W@W>=518067^Nwm3W^džSg62S6 h401S <Xd>=NySfgIQSIQNg{~~opňn W,g~g/f1uQXeIQ~[IQg10SIQN g{2((W[IQghTSIQbz@w[IQghb)0 qcSIQNg{2N5u;2Nv^Tvo SOpS7R5ug30[IQghb-N_NSIQbWvN[IQghbvSIQNg{40~ [\ag50[IQg̀bpS7RNB\ǑIQPgeB\6I{~bv~~op0:yaV-Nl;uQǑIQ eB\601uNǑ(uSIQNg{R~2NTRPAm5u;QY~v^T cؚSIQNg{O(u [}Tv^ N_%N=^N;44 <REC> <3uS>=CN200610085237.X < Ty>=~s|N'lS/N'lSRx YTirSvQ6RYel <;NR{|S>=B01J21/06(2006.01)I <R{|S>=B01J21/06(2006.01)I;B01J27/057(2006.01)I <3uN)RCg N>=[_'Yf[ <Sf N>= _܀IN;H\of;0usO;ܐ*me;ёF^;hg[ey;4Tpg <lQ_lQJT e>=2009.01.21 <lQ_lQJT S>=CN100453165 <N)RNt:gg>=[_wTe[N)RNt gP#NlQS <NtN>=4T/TЏ <3ue>=2006.06.02 <0W@W>=230039[_wT^3S <Xd>=Ny~s|N'lS/N'lSRx YTir HQ1uMRqSOxobV/lSbkxxbkxx 'lNSeO<sub>2</sub>bNRxxǏGWvS^ube[b_ YTir QǏ4ltmHSlb4lpTblb ؚ)n|ppl_0Rvfv YTir0 YTir(ukbc5uP[>f_\0\5uP[>f_\0X\~M\ N0ؚR\5uP[>f_\0bfIQ1N0X\~ϑrceRgN0X\~IQ5uP[1N0 ~YIQ1N0+}YIQ1NI{Km[ ~ghf YTir:Ntb_|P[ |_10-30~s| vfW ~g:Nwv YTir-NRxNCQ }GWNckVNb__X[(W SeO<sub>2</sub>vX[(WOTiO<sub>2</sub>v+}YIQ1 8T6eSu݄y S^NirUS(Rx(WSIQ:S g8T6e0SeO<sub>2</sub>SNcؚ~s|TiO<sub>2</sub>[*Y3IQIQ )R(us N cؚ~s|TiO<sub>2</sub>IQPSRRS~s|TiO<sub>2</sub>*Y35u`l'`0 <VwNx>=[_;34 <REC> <3uS>=CN200380108858.X < Ty>=_W:ghb_WIQ5uP[hVNSuNhVNv}SO <;NR{|S>=B81B7/00(2006.01)I <R{|S>=B81B7/00(2006.01)I <3uN)RCg N>=] z8TllQS <Sf N>=lg?s|'k <lQ_lQJT e>=2009.01.21 <lQ_lQJT S>=CN100453442 <N)RNt:gg>=-NVVE8fOۏYXTON)RFUhNR@b <NtN>=Ng s <3ue>=2003.12.24 <0W@W>=a'Y)Rs|pQ <Xd>=,gSfb2NNy_W:ghhVN(1020)b_WIQ5uP[hVN (30) Sb8TlPgevlyir(172535) (uN8T6e[N@b hVNvd\O/f g[vlSO NSƖb|~(18 18 19 19 ) (uN(WhV Nv[}Tg(WeNY萠Rp8TlPge0؏b2N(uN6R ُN hVNv}SOv N Tv[eO0 <VwNx>=a'Y)R;IT <REC> <3uS>=CN200580021400.X < Ty>=(uN5ulTIQf[NޏvY <;NR{|S>=G02B6/43(2006.01)I <R{|S>=G02B6/43(2006.01)I;H05K1/00(2006.01)I <3uN)RCg N>=yr\lQS <Sf N>=Jl(wc <lQ_lQJT e>=2009.01.21 <lQ_lQJT S>=CN100454064 <N)RNt:gg>=-NVN)RNt(/n) gPlQS <NtN>= _N[;h 8l <3ue>=2005.06.24 <0W@W>=VR)Ry<\N] <Xd>=NyIQf[-5uP[cS(10) Sb5ul^0[ň(Wl^(18) N v5ulN(16)0y_l^[ňvIQf[N(14)Tg'`Nޏ(12) g'`Nޏ(12)wQ g5ulޏc0RIQf[Nv,{NzT5ulޏc0R'}c 5ulNv,{Nz05ulNSSb5u_~N5ul^SSbޏc0R ُN5u_~v[5u~0g'`Nޏv,{NzSvc5ulޏc0R5ul Nv5u_~bvc5ulޏc0R'}c5ulNvMOnv[5u~0g'` IQ5uP[NޏSSb,{NT,{NN5uB\0wQ gn(WُNN5uB\KNv OS~vOSB\0(W,{NT,{NN5uB\ Nvc0Ws^bB\T5ul&T ,{NT,{Nc0WB\vY*NS0 <VwNx>=V;US <REC> <3uS>=CN200510090612.5 < Ty>=2bk Ncknx!jWWceQvIQf[<{|~ <;NR{|S>=G02B6/36(2006.01)I <R{|S>=G02B6/36(2006.01)I;G02B6/42(2006.01)I;G02B6/26(2006.01)I <3uN)RCg N>=JDS$\<\_`lQS <Sf N>=y^t_9N<\\sb=2009.02.04 <lQ_lQJT S>=CN100458483 <N)RNt:gg>=^]NSۏTTN)RFUhNt gPlQS <NtN>=ѐ\| <3ue>=2005.08.17 <0W@W>=VR)Ry<\N] <Xd>=,gSfmSNyIQ5uP[|~ @bIQ5uP[|~SbIQ5uP[!jWWT<{~N N\@b IQ5uP[!jWW5ulޏcv^V[0R;N{:gY N0(W@b!jWWT<{~N NcOv^v:gh  LNpr& ( F H l n   ( * V X 6 8 | ~   Z \   4 6 j l (*RT~XZ ^` "`bz8hJh52 hJo(` Nr( H n  * X 8 ~  \  6 gdJ6 l *TZ `"b|~: gdJ8: 46Z\np npPR(*npBDz|>@jl,.pr8:~,<hj<>df hJo(hJb 6\p pR*pD|@lgdJ.r:.0<j>f*B^gdJ(*@B\^. 0 t v ! !"!2!^!`!!!!!^"`"~"""""" #"#4#6#B#D#d#f###$$R$T$$$$$B%D%%%%%"&$&<&L&x&z&&&&&''''((.(0(Z(\(((((( hJo(hJb^0 v !$!&!2!`!!!`"""""#6#D#f##$T$$$D%%%gdJ%$&>&@&L&z&&&''(0(\(((((B)))*b***:+@+Z+\+h++gdJ((((@)B)))))**`*b*****8+:+>+@+X+h+++++++, ,<,>,X,Z,,,,,,,,,,,2-4----- .".l.n...//P/R/x/z/////0080:0000011,1.1X1Z111111111J2L22233V3X33 hJo(hJb+++ ,>,Z,,,,,,4---".n../R/z/////0:0001.1gdJ.1Z11111L223X33244.5H5J5V5555 6D6h6666 7,7B77gdJ33042444,5.5F5V55555556 6B6D6f6h66666667 7*7,7@7B7777788V8X8r8t8888888"9$9z9|9999999::D:F:`:b:::::::0;2;p;r;;;;;*<,<h<j<<<<<<<==D=F=x=z=== > hJo(hJb778X8t888888$9|9999:F:b::::2;r;;;,<j<<<gdJ<<<<=F=z==">t>>>>?4?P???(`B`D`P`~```aBaaaagdJ >">r>t>>>>>>>??2?4?N?P?????`&`(`@`P`|`~`````aa@aBaaaaaaabb(b*bJbLb~bbbbcc\c^ccc d dddfdddddd e8e:evexeeeff*f,f`fbfffffffffggPgRggggg0h2hvhU hJo(hJa~gN2bk!jWWceQ N|Q[v<{~N-N0 <VwNx>=V;US <REC> <3uS>=CN200710064777.4 < Ty>=Ny(WExvfGr N6RYExSAvel <;NR{|S>=H01L21/20(2006.01)I <R{|S>=H01L21/20(2006.01)I <3uN)RCg N>=-NVyf[birtxvz@b <Sf N>=\g\;sUZ;s R;hX; _)YQ;vQdW <lQ_lQJT e>=2009.02.04 <lQ_lQJT S>=CN100459046 <N)RNt:gg>=SN-NR3IQwƋNCgNt gP#NlQS <NtN>=9\/c/T <3ue>=2007.03.26 <0W@W>=100080SN^wmm:S-NsQQgWS NW8S <Xd>=,gSflQ_NNy(WExvfGr N6RYMg<sub>2</sub>Sivel sSRNek O!k(WؚwzzsX NpYtExvfGr_nmvExhb0NO)nlyё ^\A0NO)n'lSё^\AN_MgOB\0NO)nly'lSirvB\0 NSؚ)nkpb_bMg<sub>2</sub>SiB\ N 6RYQMg<sub>2</sub>Si vQOv ~vf'`hf勄^8^TNؚ'`IQ5uP[hVNNSp5uhVNv6R \O0Mg<sub>2</sub>Si/fNyzy&^JS[SO wQ gp5u|peؚ05u;sSp[sNO vyrp /fOovp5uhVNPge Te[S/fnWExo}Yv'kYc Pge (WExWƖb5u0_5uP[/IQ5uP[hVN-N_N g͑v^(uMRof0 <VwNx>=SN;11 <REC> <3uS>=CN200510101679.4 < Ty>=WNWge/e:g YTv^~'`IQf[ZTirS6RYel <;NR{|S>=C09B69/10(2006.01)I <R{|S>=C09B69/10(2006.01)I;G02B1/04(2006.01)I <3uN)RCg N>=NSWSt]'Yf[ <Sf N>=ZY~;Ng _;Y/Te;hFQq <lQ_lQJT e>=2009.02.11 <lQ_lQJT S>=CN100460471 <N)RNt:gg>=^]|ؚN)RNt gPlQS <NtN>=UOms <3ue>=2005.11.30 <0W@W>=510640^Nw^]^)Yl:SNq\381S <Xd>=,gSflQ_NNyWNWge/e:g YTv^~'`IQf[ZTirS6RYe l \Sol-Gell^(uN^~'`IQf[ZTirv6RY (WNON g:gurVvR )n^ N \e:gstN g:gurVۏLcBgb.T6RY g:g/e:g YT^~'` IQf[ZTir Ǐe:gstvR'`e[W N~~gTOovؚ)n3z['`egb6R g:g^~'`IQf[urVvST~g_ cؚ^~'`IQf[ZTirvؚ)n3z['`0ُ yel6RYvZTirwQ go}Yvؚ)n3z['`0Sz4xn㉦^[ g:gurV(W Y TPge-N+TϑvP6R0ffNb g)RNhVNS0,gSfv+TWge/e:g YT^~'`IQf[ZTirS^(uNIQ0IQ5uP[f[TIQOo`YtI{W0 <VwNx>=^N;44 <REC> <3uS>=CN200510009084.6 < Ty>=(uNIQ5uP[hVNv+T g[5uZTirvRceSOT <;NR{|S>=C08J5/18(2006.01)I <R{|S>=C08J5/18(2006.01)I;C08L81/00(2006.01)I;H01L33/00(2006.01)I <3uN)RCg N>=lSONTNSf[lQS <Sf N>=_lf[_;RD]e[ <lQ_lQJT e>=2009.03.25 <lQ_lQJT S>=CN100471899 <N)RNt:gg>=-NVN)RNt(/n) gPlQS <NtN>= \q;ꖅh <3ue>=2005.01.12 <0W@W>=V[Yl<\N] <Xd>=cONNyRceSO0Ny1uRceSOb_bvTIQ5uP[hVN0RceSO+T g [5uZTir vQ+T g|^\N450mmv| vQ-N[5uZTirSbSNb*g SN0 N&^5uwb&^5uwv{V)Tv^[3 4-b]{V)TZTUSCQ v^NvQ-N1uRceSO nmAm^ bvv5u[s:N10<sup>-1</sup>^10<sup>-6</sup>S/cm vQO(uVpclKm[0 <VwNx>=V;US <REC> <3uS>=CN200610080318.0 < Ty>=hTfIQňn0mwe>fq_ňnShTfIQel <;NR{|S>=G03F7/20(2006.01)I <R{|S>=G03F7/20(2006.01)I;G03F7/30(2006.01)I <3uN)RCg N>=NNkRyR*h_O>y <Sf N>=\ Nll; NQgNΐ <lQ_lQJT e>=2009.03.04 <lQ_lQJT S>=CN100465795 <N)RNt:gg>=-NVN)RNt(/n) gPlQS <NtN>= _)Y[ <3ue>=2006.05.09 <0W@W>=e,gNN <Xd>=,gSf-NSb,{1IQb_bNT,{2IQb_bN Tꁄv eQSOMn(WegIQnvIQ5uP[_gvQ,{1>enS >enWg ~Wvt1uel v^NWgvhTMONeg,{1IQb_bNv QSOvIQ5uP[_ggq\:SW,{2>enS WgvhTMONeg,{2 IQb_bNvQSOvIQ5uP[_ggq\:SWnIQ:gg (uNn!ceg ,{1T,{2IQb_bNvIQvgq\01uNSOYSǑ(uqQvIQ n[,{1>enST,{2>enS NvWgۏLhTfIQ @bNwQ g:_ vYtR v^NYb6Rňnv'YWS0 <VwNx>=e,g;JP <REC> <3uS>=CN200380102561.2 < Ty>=5u5u[hV(u5u㉲mS5u5u[hV0NS g:gvVlݔxvv6R el <;NR{|S>=H01G9/035(2006.01)I <R{|S>=H01G9/035(2006.01)I;H01G9/04(2006.01)I <3uN)RCg N>= NSf[*h_O>y <Sf N>=fk0u?ex^;[QZS+Y;[`ڋ <lQ_lQJT e>=2009.03.04 <lQ_lQJT S>=CN100466122 <N)RNt:gg>=SN NSwƋNCgNt gPlQS <NtN>=NpQ <3ue>=2003.10.31 <0W@W>=e,gNN <Xd>=cOݔ5u5u[hV05u5u[hV(u5u㉲mSO(u5u㉲mv5u5u [hVNS[Nݔ5u5u[hVI{/f g(uv g:gvVlݔxvv6R e l0vQ-N ݔ5u5u[hVSb3g0+T gݔv4gNS+T g+Tl4yP[ vvv5u㉲m vQyr_:N5u㉲m-N4lvSm^\NI{N1͑ϑb vQyr_:NǏX\~IQ5uP[IQ1l(XPS) [(W125!Rp50\eTv ݔ5u5u[hV-Nv4gvhbۏLRge Al2pIQ1\=e,g;JP <REC> <3uS>=CN200310121490.2 < Ty>=NyJS[SOPge*jThTgdBgvelSvQňn <;NR{|S>=H01L21/268(2006.01)I <R{|S>=H01L21/268(2006.01)I;H01L21/428(2006.01)I;C30B31/20(2006.01)I <3uN)RCg N>=-NVyf[bIQ5ub/gxvz@b <Sf N>=H.s_;YIll;HeWS;HCQW <lQ_lQJT e>=2009.03.04 <lQ_lQJT S>=CN100466179 <N)RNt:gg>=SNyuN)RNt gP#NlQS <NtN>=RyZ;bS ~ <3ue>=2003.12.19 <0W@W>=610209V]wb^SAm350O{ <Xd>=,gSfmSNy[sJS[SOPgehTgdBgelSňn 1uwzz[0SP[ n0QvT[0S\\I{gb (WJS[SOPgevuǏ z-N Tely,gSOPge TdBgPge oIQ{l:WN[dBgPgew\O(u OdBgSP[(W*jTb_ bhTg[^R^ ,gSOPgeGWSR^ [sJS[SOPgevhTgdBg0勹el wQ gd\O{O0dBghTg\(IQlvNJS)0Hesؚ(S Te6R\Opev_ 'YvϑP[~bϑP[p)I{Op S^l^(uNeWV`5uP[0IQ5uP[hVNS JS[SOirttxvzI{eb0 <VwNx>=V];51 <REC> <3uS>=CN200710099110.8 < Ty>=(WSiO<sub>2</sub>l^ NuZnOvel <;NR{|S>=H01L21/363(2006.01)I <R{|S>=H01L21/363(2006.01)I <3uN)RCg N>=SNN'Yf[ <Sf N>= _ ^n;RQZ;Y[ ^;Ğwm4t;Y_R;s8lu <lQ_lQJT e>=2009.03.11 <lQ_lQJT S>=CN100468662 <N)RNt:gg>= <NtN>= <3ue>=2007.05.11 <0W@W>=100044SN^wmm:SvY NVQg3S <Xd>=,gSflQ_NNy(WSiO<sub>2</sub>l^ NuZnOvel ^\NJS[SOPgeNhVNW yr+R/f(WSiO<sub>2</sub>(w)l^ N(uMBEuZnOvel0勹elvekO!k:Nek1 \nmǏvSiO<sub>2</sub>l^ OeQMBEu|~ (W700-900! N ؚ)nYt20-40R Q(W 400-500! N 'lI{yP[SOYt20-40Rek2 (W400-500! N uS^:N1-4nmv MgOg'`B\ek3 (W700-800! N kpYt10-30Rek4 (W350-450! N u S^:N10-30nmvZnOǏ!nB\ek5 (W700-900! N 'lI{yP[SOll Nkp10-30 Rek6 (W600-700! N ۏLY^uZnO0(uSiO<sub>2</sub>Nf݄[wTExI{l^u ؚ(ϑZnOvel ǏMgOg'`B\TZnOǏ!nB\6RYQؚ(ϑvZnO0SiO<sub>2</sub> l^vOp/f6RY]z{US0b,gNO g)RN(WIQ5uP[hVNebv^(u0 <VwNx>=SN;11 <REC> <3uS>=CN200510012005.7 < Ty>=Ss|~^vUSvf~s|~5Rv6RYel <;NR{|S>=B82B3/00(2006.01)I <R{|S>=B82B3/00(2006.01)I;C30B29/02(2006.01)I;C30B29/60(2006.01)I <3uN)RCg N>=nNS'Yf[ <Sf N>=Y[[g;f 3;Ywmޘ; _^~;e Ux;~NS;R O <lQ_lQJT e>=2009.03.18 <lQ_lQJT S>=CN100469682 <N)RNt:gg>= <NtN>= <3ue>=2005.06.24 <0W@W>=100084SN^SN100084-82O{ <Xd>=Ss|~^vUSvf~s|~5Rv6RYel ^\N~s|Pge6RYb/gW0,gSf (u stIQ~:NW^ (uwzzp@el(WstIQ~NOly$NGrR+R\O:N4gT3g (W4gT3gKNlIQ~tTlyRbAg<sub>4</sub>I<sub>5</sub>yP[[5u v^OvQv4gT3g0(Wwzz -N [4gT3gKNeRR`[vAm5uS ~peAS\eT 4guQ^Ss|ϑ~ vUSvf~s|~5R0勹el(WhQV`sXNeNUO!jgvagN N[s d\O{US 5R ^1u5uec6R 5R-Nv~s|~|_dks^LcR N5RfNNW^Ry S\O:N[ ~bhVN^(uN[‰:\^v5uP[f[0IQ5uP[f[W-N bvc\O:NhbX:_bfce\W^(u NSf[RgW-N0 <VwNx>=SN;11 <REC> <3uS>=CN200610011188.5 < Ty>=NyƖbvhbI{yP[lSuhV <;NR{|S>=G01N21/41(2006.01)I <R{|S>=G01N21/41(2006.01)I;G01N23/00(2006.01)I <3uN)RCg N>=nNS'Yf[ <Sf N>=ĞN;R N; _ ];m__l_ <lQ_lQJT e>=2009.03.18 <lQ_lQJT S>=CN100470237 <N)RNt:gg>= <NtN>= <3ue>=2006.01.13 <0W@W>=100084SN^SN100084-82O{ <Xd>=,gSf^\NIQ5uP[b/gW vQyr_(WN [bJS[SOoIQNg{bJS[SOSIQNg {Nё^\ TeƖb(W TNyl^Pge N Ǐ~gvT]z \JS[SOoIQN g{bJS[SOSIQNg{vQ\IQ:Wc6R(Wё^\vzbbyr[vhbMOn OvQؚHes 0WoRwё^\hbvI{yP[:W ُ7h1\ NY萄voRIQnTh\I{RyCQhVN N NYMOn 3z['`}Y hVNv:\^SN\N1mm :NhbI{yP[l(WOo`0 Oa yr+R/fIQP[ƖbI{W-Nv[E^(ucOS0 <VwNx>=SN;11 <REC> <3uS>=CN200710064457.9 < Ty>=SƖbvIQP[vfSOSl[ST&T_AmSOb\s OahV <;NR{|S>=G02B6/10(2006.01)I <R{|S>=G02B6/10(2006.01)I;G02B6/12(2006.01)I;G02B6/26(2006.01)I;G01N21/41(2006.01)I <3uN)RCg N>=nNS'Yf[ <Sf N>=kSf[;ĞN; _ ];m__l_ <lQ_lQJT e>=2009.03.18 <lQ_lQJT S>=CN100470276 <N)RNt:gg>= <NtN>= <3ue>=2007.03.16 <0W@W>=100084SN^100084O{82R{nNS'Yf[N)RRlQ[ <Xd>=,gSf^\NIQ5uP[b/gW vQyr_(WN (WJS[SO NǑ(u5uP[_gfIQTr^l;R]z b_bIQP[vfSOSl[~g IQP[vfSOl[$Nzc g[IQ(uvޏcIQl[ v^Ǐ bnl;R SdzrrrB\vNRb_beh/ed~g01uNIQP[vfSOSl[vST&T\O(u vP[y O[ !j_NSp[^svIQNvl[ST&T0R&Tl[-N [vl[ OIQ1Qs f>fQw0S_cKmvAmSOir(EQnIQP[vfSOhTgT[Q0b@bIQP[vfSOB\v N NzzT 1\9eSNIQP[vfSOSl[-N O[!j_vrceyr'` b1uNYRv\O(u9eSN@brceyr'` O_wvP[y O[!j_NSpsvSSۏ _wvl[\IQ1vSS N [sN ؚupOe^0SƖbIQP[vfSO~gv_Amϑb\scKmN Oa0 <VwNx>=SN;11 <REC> <3uS>=CN200380106959.3 < Ty>=6RYY*NޏcvIQ5uP[hVNvelTv^vIQ5uP[hVN <;NR{|S>=H01L27/00(2006.01)I <R{|S>=H01L27/00(2006.01)I <3uN)RCg N>=QReh>f:yb/g gPlQS <Sf N>=TN~hje;tg_Z\h <lQ_lQJT e>=2009.03.18 <lQ_lQJT S>=CN100470797 <N)RNt:gg>=-NVVE8fOۏYXTON)RFUhNR@b <NtN>=s <3ue>=2003.12.18 <0W@W>=VQReh <Xd>=,gSfcONy(uN(WN*Nl^(101) N6R Y*N5uޏcv g :gIQ5uP[hVN(110)vel SbHQ(Wl^ N)R(uN Nek6RYY *N g:gIQ5uP[hVN(W@bl^ NcON*Nb_bVHhv,{N[5uPg eB\ (W@b,{N[5uPgeB\KN NcO g:gIQ5uP[PgeB\(103) N S(W@b g:gIQ5uP[PgeB\KN NcOb_bVHhv,{N[5uPgeB\ \R0WdS*g1u@bb_bVHhv,{N[5uPgeB\vv@b g :gIQ5uP[Pgev:SW vQ!kcO5uޏcR(105)(uN5uޏc@bY *N g:gIQ5uP[hVN-Nv\$N*N0@b g:gIQ5uP[hVN[0W/f g:g IQuOSbhVNb g:g5uSIQhVN0 <VwNx>=V;GB <REC> <3uS>=CN200410082141.9 < Ty>=5uP[hVNTb_b5uP[hVNvel <;NR{|S>=H05K3/34(2006.01)I <R{|S>=H05K3/34(2006.01)I;H05K1/18(2006.01)I <3uN)RCg N>=WYTTe5uP[Pge gP#NlQS <Sf N>=NE^e;MPXb,g <lQ_lQJT e>=2009.03.18 <lQ_lQJT S>=CN100471364 <N)RNt:gg>= NwmN)RFUhNR@b gPlQS <NtN>=l8lu <3ue>=2004.12.21 <0W@W>=Vl(^X <Xd>=lQ_Nb_b5uP[hVNvel0勹elSb(a)cOWgT_ޏc WgvCQN vQ-NCQN 5uP[CQN IQf[CQN hVNv T[Nv ~T(b)\ qeeRWgT/bCQN vQ-N qeS+T}SOT +T gё^\|vё^\RT(c)OWgTCQNNvc0 qewQ gk qeqSN勔qSOQ!kQVT@b_vVv~)n^NOvVv~ )n^0 TecONSNǏ,gSfvelb_bv5uP[hVN0SN(W5uP[ ]N-Nv[\5uP[hVN\ň-N_0RwQSOv^(u OY 1uJS[SOvfGrb_ bv[\IQ5uP[hVN\ň0 <VwNx>=V;US     ab*bLbbbc^cc dfdddde e:exeef,fbfffffgRggggdJg2hxhhiLiiiiiijNjjj(kRk~kkkklTlllbm|m~mmmgdJvhxhhhiiJiLiiiiiiijjLjNjjjjj&k(kPkRk|k~kkkkkkkllRlTlllll`mbmzmmmmmmn nvnxnnnnnnn o"oPoRodofooooooo p"p^p`pppppqqXqZqqqqqqq"r$rXrZrrrrr s hJo(hJbmm nxnnnn"oRofoooo"p`pppqZqqqqqq$rZrrr s6sgdJ s s4s6s`sbsssssssss t"t^t`ttttt*u,urutuuuuuvvDvFvxvzvvv8w:whwjwwwwwww$x&x@xBxbxdxxxxx"y$yfyhyyyyy2z4zNzPzhzxzzzzz"{${X{Z{|{~{{{{{||,|.|:|<|\|^|||}}t} hJo(hJb6sbsssss"t`ttt,utuuu v vvFvzvv:wjwwww&xBxdxxxgdJx$yhyyy4zPzjzlzxzzz${Z{~{{{|.|<|^||}v}}R~~gdJt}v}}}P~R~~~BD\lʀ̀HJ\^jlĂƂprHJ>@RTl|Ѕ҅bd$&24TV68܈ވ24^`x hJo(hJbD^`l̀J^lƂrJ@Tnp|gdJ҅d&4V8ވ4`z|&̊"LxgdJ$&ʊ̊ "JLvxZ\PRFH~Ԏ֎FHz|؏ڏ.0fhz|8:vx46vx֒ؒ,.TVHJr hJo(hJb\RH֎H|ڏ0h|:xgdJx6xؒ.VJtΔd*hgdJrt̔Δbd(*fh $&*,028:h!jh!U hJhJ hJo(hJ'"$(*.0468:gd;gdJ 6182P:p52. A!"#$%S j 666666666vvvvvvvvv666666>6666666666666666666666666666666666666666666666666hH6666666666666666666666666666666666666666666666666666666666666666662 0@P`p2( 0@P`p 0@P`p 0@P`p 0@P`p 0@P`p 0@P`p8XV~ OJPJQJ_HmH nHsH tHJ`J 52cke $1$a$ CJKH_HaJmH nHsH tH$A $ ؞k=W[SOBiB 0nfh3\`?/[G\!-Rk.sԻ..a濭?PK!֧6 _rels/.relsj0 }Q%v/C/}(h"O = C?hv=Ʌ%[xp{۵_Pѣ<1H0ORBdJE4b$q_6LR7`0̞O,En7Lib/SeеPK!kytheme/theme/themeManager.xml M @}w7c(EbˮCAǠҟ7՛K Y, e.|,H,lxɴIsQ}#Ր ֵ+!,^$j=GW)E+& 8PK!mQtheme/theme/theme1.xmlYMoE#F{oc'vGuرhF[x=ޝzvg53NjHHzZ $ʯI)*E_N&IA!>Ǽ3xN>UWL0Č߫߿z}rx{h9T8T/χ?xY'~3S~O_|w)ӈHt=a+d NG1-RlƁ1RJwT蠯M1K"o he˓ێ½PL-|%EhY7'qP.\L=dqķ3Iofi.ñBRb-JP_pG ݢiKtdӌhFio7;7Q2ȾD>a/Q>XW ˔M_uHq)h +:Viw4rBqϫ"r!2laCbU|!8^8>ܠ,AбVt׎~ls14_=,ɬožTV G"ѦbH'.4x޵w-ϷE|F;v`b3"G 'e\fHO '$i_wp >*8i&LY%\,xҕ= r6f 3Tʅ):ªZKLs&C Mܛ0 [˫p@ע`j۽7 YHxHicT5Ar@HZAZC}i' RQ\m,zo,gQu{Y\,Nר/=L _.̇Y7C6-fSh62"5NHT[X65̫4X%Yֳ2fkhi~tCKF#b +w1m|4`!:U!p5a:~{4mmio ήc8mDJpSǹ橠V1?#Si?3E'pS2W`qB]( 08w nA[s)k8= Aa?R dڒɾcUӽ˲d)#Queb}C!&i0>4S7{z F} 4sKvUKoȳh~1jYUVH5U8Vk;֜L9ŰD ?*|FL "A3>g]dm2iVֵ褽mg 7  8(3 >vh st}r: #&),/NPSVY6 ^%+.17<agm6sxx:!"$%'(*+-.LMOQRTUWXZ\(# AA@ 0(  B S  ?H 0(    (*,/0128:>TW )*+-/1Rijkvyz{  "%-278EHQVWY]_amp   +2AGIWY\^acftv~0OY\p!MUWacjloqx .7\jm9=?AMPdfhlnr  !(7=?EFHIMORTUY\jlntvxz    77}ST.1Y] =@_b773ss333333333377J525!x;77@@ 7PPPP"P`UnknownG* Times New Roman5Symbol3. * Arial7.{ @Calibri;[SOSimSunACambria Math 1hFFI?/ dI?/ d?!%),.:;>?]}    & 0 2 3 : !6"000 0 0 0000006:>@DZ\^ =@\]^$([{  0 0 000000Y[];[l7l72HP  $PJ2!xx Tg TgOh+'0l  ( 4 @LT\d Normal.dotm2Microsoft Office Word@@X?@ABCDEFGHIJKLMNOPQRSTUVWXYZ[]^_`abcdefghijklmopqrstuwxyz{|}Root Entry F@"